Chemical Mechanical Polishing LiTaO3 Wafer from Ultraviolet to Infrared Wide Transparency Range

Lithium tantalate (LiTaO3) has piezoelectric, electro-optical and nonlinear optical characteristics, and a wide transparency range going from ultraviolet to infrared. It is desirable that LiTaO3 wafer was a smooth surface in order to function with good quality. Chemical mechanical polishing (CMP) has been used to planarize integrated circuits (ICs) or obtain a high surface quality of the substrates. This paper investigates the effect of citric acid as an additive in the slurry for LiTaO3 CMP. The roughness of the wafers was measured by an atomic force microscopy (AFM, XE-100) after polishing. The slurry, which contains citric acid as an additive, has a higher material removal rate and friction force than a slurry without an additive. After polishing, the surface roughness of the LiTaO3 wafer can be reduced down to 1.7A of Ra.

FAQs:

1. Q: What are the products you mainly work on?

A: We look at ourselves as the piezo wafer specialist. We are the very first to work with Single Crystal Quartz in China about 30 years ago. Then gradually we step in the field of LiNbO3, LiTaO3, Quartz glass, LGS, CTGS etc. Especially, if you are looking for a piezo quartz supplier, we are the ultimate choice! We export millions of quartz blanks each year because we master the AT, SC and IT cuts with superior angle precision.

2. Q: Can you accept product customization?

A: Yes, of course. We can fabricate as per your request. In addition, we are so experienced with piezo wafers that we can provide you relevant suggestions if you are not 100% sure about your choice. Besides, we do have some standard wafers in stock, please check with us.

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A: Yes, we would suggest you go with the courier agent you are most familiar with (DHL, FedEX, UPS etc.). We can ship via your account. And, of course, we will pack the products safely in acceptable size to help you save the shipping cost. If you need us to take care of the freight, it’s also not a problem. We also have good discount with the international courier companies.

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A: The wafer products are fragile and sometimes expensive. The last thing, as the manufacturer, we want to see is the products we make were damaged during courier. As a result, we will pack the wafers adequately and put them in a proper carton filled with buffer sponge. However, accidents are inevitable sometimes. So, please follow the “Acceptance check” steps shown in the drawings below. If the unwanted happened, we will either give the replenishment or refund if you follow the checking steps.

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Acceptance Check

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Founded in 1999, Hangzhou Freqcontrol Electronic Technology Ltd. is a China leading manufacturer of piezoelectric crystal wafers, substrates, components and single crystal growth. We, known as the "CQT Group" in global market, headquartered in Hangzhou, China, empowered by its manufacturing sites in Shanghai, Jiaxing and Deqin etc.

Our products are mainly used in RF Telecom, Semiconductor, Biotech, Optical engineering and frequency control industries. The monthly production capacity: 500K single quartz blanks (SC, AT, IT, FC, etc.), 20K quartz wafers (AT, ST, X, Z, etc.), 10K LiNbO3 wafers (3~8 inch), 10K glass wafers (Fused silica, Borofloat33, Corning, etc.), 8K LiTaO3 wafers (3~6 inch), and 100K filters/oscillators (VCXO, TCXO).

Our company vision is to be a reliable primary Microelectronic substrates supplier in today's world.

The CQT Group consists of five major plants with total floor area over 10,000 m². Our production machines include crystal growth furnace, wire saw, X-ray orientation, grinding machine, polishing machine, chamfering machine, CNC, REDOX chambers etc. Inspection equipment include Flatmaster 200, AOI, profilometer, optical imager, X-ray inspector etc. We are also equipped with Class 100 and 1000 clean rooms.

The CQT group is primarily known as the expert of hexagonal crystals, We master the manufacturing process of single & doubly rotated quartz blanks, and we can provide quartz of any orientation cut whether given by IRE , Miller index, Euler angle or conventional sign.

In addition to our leading quartz blank manufacturing capabilities, the last decade sees our major technological breakthroughs. We overcome the 3~6 inch ultra-thin wafer mass production barrier, obtained the reduction technology of black LiNbO3 & LiTaO3 wafers, and achieved 8 inch LiNbO3 wafer mass production successfully.

Competitive Advantages

1. Reliable partner: We are in this business for over 30 years, served over 200 customers in 20+ countries.
2. Complete production line: We do crystal orientation, wire cut, grinding, polishing, etching, flat/notch, surface inspecting, x-ray detecting etc. all in house!
3. State-of-the-art cleanroom: We have 3 Class1000 clean room, 1 Class100 work desk, complete wafer cleaning & drying process.
4. Efficient customer service: Prompt RFQ response & Order confirmation in 24 hrs, customization lead time in 4 weeks.